Technical Synopsis

Film Measurement System

Thickness Range

* 100-500,000 angstroms

Spot size

* 50ym with 5X Objective
* 25ym with 10X Objective
* 6.5ym with 40X Objective

Reproducibility

* 5A + or - 5%
* dependent upon film type
* Measurement Time 2.5 sec (typical)

FILM TYPES

* Nitride on Silicon
* Polysilicon on Oxide
* Nitride on Oxide
* Oxide on Silicon
* Negative Resist on Silicon
* Negative Resist on Oxide
* (Thick Films) 115V 50/60 Hz