Products: Ion Mills
VEECO MICROETCH LL-250
- Automatic Loadlock Ion Beam Etch System
- Clean, anisotropic, high yield etching of any material including Au, Du, Ni, Cr, and TiW. Multistep etch processes for stacked Layers (MLC, MCM), ceramics, hybrids, thin film heads, heads, flat panel displays, and high frequency devices
- Substrate capacity 150 mm
- Process flexibility includes IBE, RIBE, CAIBE
- Patented “Flowcool” substrate cooling system with failsafe sensing
