Yield Engineering System; YES-5 is a Vacuum Bake Vapor Prime System. The system is designed to create the ideal surface for photoresist adhesion.

1. Microprocessor control of output with input monitoring
2. Multi-programming capabilities
3. Cycle complete/abort light and sonalert
4. Electropolished 316 stainless steel chamber
5. Internal chamber welds
6. Two independent overtemperature safety switches
7. Preheated nitrogen
8. Nitrogen filter, 0.5 micron
9. Top-welded, internal stainless steel shelf
10. Program lock-out
11. Side-mounted HMDS flask