Technical Synopsis

Prime Processing System

The  Yield Engineering System (YES) LP-III is a tri-functional vacuum oven that can be used for vacuum vapor priming, image reversal and silylation.  With the HMDS flask head off, the unit will function as a standard vacuum vapor primer.  HDMS vapor priming is used to improve the adhesion of the photoresist to the wafer.  With the HDMS heater on, the unit will supply higher pressure hot HDMS for silylation.

* Microprocessor Controlled
* 120 VAC; 11.3; 60Hz; 1300 watts
* PreHeated N2 ( Process Gas )
* Keylock
* Vaccuum Pump - CFM
* User’s Manual
* Temperature as High as 200 degrees C