RIE System with the following features:

• Fullly automated RIE system with computer control, CRT and Keyboard 
• SST Chamber 
• 12” Water Cooled Electrode 
• Balzers Turbo Pump 
• Leybold Mechanical Pump 
• AE RFX 600 Power Supply with auto matching network 
• Laser Endpoint Detection
• Bay Voltex Water Chiller