Perfect for Research & Spectrometry studies.

Parallel plate type RIE - 11″ Upper electrode & 9″ lower electrode

Multi-wafer size design up to 8″ wafers

Graphite feature plate

Adjustable upper electrode height

Seiko seiki turbo pump (STP-H300C) w/ Seiko Seiki STP controller

9 MFC (all MKS 1159)

Advanced Energy RFPP 5S w/ AM5 matching network

290 Ion Gauge controller

MKS 286 Controller

Disconnect box

Plasmatherm PC OS

208V, 60amp, 60Hz 3 phase