Products: Plasma
Tegal Plasma 915 Batch 3 Etcher

Technical Synopsis
Height 34 ”
Width 24″
Depth 36″
Weight Approx: 400 LBS
Pump D 30 A
Wafer Capacity: 100-125mn 220 VAC
ELECTRODE CAGE
Height 8.26″
Width 16.37″
Depth 12.38″
REACTION CHAMBER
Height 10″
Width 18″
Depth 12.75″
