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Products: Plasma

Tegal Plasma 915 Batch 3 Etcher

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Technical Synopsis

Height 34 ”
Width 24″
Depth 36″
Weight Approx: 400 LBS
Pump D 30 A
Wafer Capacity: 100-125mn 220 VAC

ELECTRODE CAGE
Height 8.26″
Width 16.37″
Depth 12.38″

REACTION CHAMBER
Height 10″
Width 18″
Depth 12.75″