Products: Surface Profilers
Dektak IIA
- Programmable Linear scanning system used for accurate measurements on vertical features ranging in height from 100 - 655,000 Angstroms
- Vertical resolution 5 Angstroms, scan time 4- 65 seconds
- 12.5 micron radius stylus with a 10 - 50mg tracking force
- Stage can handle up to a 5″ diameter wafer or parts up to 3/4″ thick
- Maximum of 1000 data points
- 3 scanning speeds
- 70x microscope is standard